Contact Information Experience Research Interests Publications

Address:

200 Broun Hall Department of Electrical and Computer Engineering
Auburn University
Auburn University, AL, 36849

Email:

xzz0017@tigermail.auburn.edu
xinyu.zhao@gao.io

Links:

Job Experience

Research Assistant 2012 - Present (current)
Department of Electrical and Computer Engineering,
Auburn University
Teaching Assistant September, 2011 - December, 2011
Department of Electrical and Computer Engineering,
Auburn University

Education

Doctorate 2013 - Present (current)
Department of Electrical and Computer Engineering,
Auburn University
Master 2011 - 2012
Department of Electrical and Computer Engineering,
Auburn University
Bachelor 2006 - 2010
Information Engineering,
East China University of Science and Technology

Imaging Processing

  • Functional Magnetic Resonance Imaging
  • Statistical Analysis of fMRI Data
  • Cluster-based Analysis of fMRI Data
  • Machine Learning

Electron-beam Lithography

  • Stochastic Exposure Simulation
  • Resist Profile Simulation
  • Critical Dimension and Line Edge Roughness Reduction
  • Scanning Electron Microscope Image Simulation

Dependency Analysis of Line Edge Roughness in Electron-beam Lithography
X. Zhao, S.Y. Lee, et. al.
Microelectronic Engineering 133, 78-87, 2015.
[link] [BibTex]

Determination and Analysis of Minimum Dose for Achieving Vertical Sidewall in Electron-beam Lithography X. Zhao, Q. Dai, S.Y. Lee, et. al.
Journal of Vacuum Science & Technology B32(6), 06F508, 2014. Microelectronic Engineering 133, 78-87, 2015.
[link] [BibTex]

Minimization of Line Edge Roughness and Critical Dimension Error in Electron-beam Lithography
X. Zhao, S.Y. Lee, et. al.
Journal of Vacuum Science & Technology B32(6), 06F505, 2014.
[link] [BibTex]

Fast Simulation of Stochastic Exposure Distribution in Electron-beam Lithography
X.Zhao, S.Y. Lee, et. al.
Journal of Vacuum Science & Technology B30(6), 06F308, 2012.
[link] [BibTex]